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In the vacuum coating machine (1), the drive unit (6) is elastic intermediate plate is mounted to variations in the chamber housing (3) by 14, and therefore the

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In a vacuum-coating machine ( 1 ), the drive unit ( 6 ) is mounted compliantly to the chamber housing ( 3 ) by means of an elastic intermediate plate ( 14 ), such

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In a vacuum-coating machine ( 1 ), the drive unit ( 6 ) is mounted compliantly to the chamber housing ( 3 ) by means of an elastic intermediate

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